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avatar: Ken B
Ken B
9 posts
Replied to Ken B's post on January 29th, 2020
Hi, Does anyone know how to fix this error code? Although vacuum doesn't go below 25 microns. I can still finish a run. Below is what I have done so far to no avail: a) Apply silicone grease to the door gasket b) Replace the gasket with a new one c) Keep applying vacuum overnight to dry vacuum pump oil d) Replace the oil Any other suggestions? Thanks, Ken
avatar: Ken B
Ken B
9 posts
Replied to Ken B's post on May 15th, 2020

I also did e) replace diffusion pump oil, f) replace the vacuum hose, and g) wipe and clean the underside of the chamber door, still to no avail.

 

I can also replace the gasket for the diffusion pump if I figure out how to order it, but at this point, I give up, as I can still finish a run despite the error code.