Observation of nano-structures   
The unique high power optics of JSM-7100F guarantees 1.2nm resolution. High magnification for the study of nano-structures is easily obtained.   
Stable high precision analysis   
The in-lens thermal FEG produces a stable large probe current. You can obtain high quality observation and analysis results. The emitter is guaranteed for 3 years.   
Magnetic specimens   
The objective lens of the JSM-7100F does not form magnetic field around a specimen. Magnetic specimens can be observed and analyzed without restriction.   
Analysis of nano-structures   
A small probe diameter is obtained with the patented aperture angle optimizing lens. You can acquire high precision analyses and high quality elemental maps in a short time by using a large probe current.   
Clean vacuum   
A specimen is introduced through the specimen exchange airlock chamber. The specimen chamber is always kept in clean high vacuum. The unique one action specimen exchange mechanism lets you insert and remove a specimen with simple operation. The specimen chamber is pumped with a TMP.   
In-lens thermal FEG   
The patented in-lens thermal FEG is efficient and produces a maximum probe current of 200nA.   
Aperture angle optimizing lens   
The patented aperture angle optimizing lens automatically optimizes aperture angle of the objective lens to form a small electron probe diameter at large probe currents.   
A variety of images, such as secondary electron images, backscattered electron images, and STEM images, are obtained. The stable thermal field emission electron source ensures research with high quality images.   
Elemental analyses with EDS and WDS, and EBSD analysis are carried out efficiently. High precision analysis can be obtained with the stable electron probe.
Magnification 10 to 1000000 x
Accelerating voltage .2 to 30 kV
Electron Microscope Type SEM FE
Probe Current 10-12 to 2x10-7 A
Microscope Type Electron
Additional Specifications SEI Resolution: 1.2 nm (30 kV), 3.0 nm (1 kV)   
Resolution at high probe current: 3.0 nm (5 nA, 15 kV, WD 10 mm)   
Electron gun: In-lens Schottky field emission gun   
Objective lens: Super conical lens   
Detector: Secondary electron detector   
Gentle beam: Integrated   
Specimen chamber: Large specimen chamber for up to 200 mm samples   
Specimen stage: Eucentric, 5 axis motor drive   
Vacuum system: SIP (x2), TMP, RP





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Nano scale resolution of non conductive sample

How to attain (2-5 nm) Nano scale resolution for non conductive particles with maximum magnification with charge free image

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