MERLIN Compact

From Imaging to Multipurpose Nano-analysis Lab for Challenging Research Activities       
MERLIN Compact and MERLIN VP Compact with the proven GEMINI I electron column enable high resolution imaging up to 0.8 nm (STEM mode) and nano analytics.       
Receive maximum information from your sample with the new on axis in-lens Duo detector, which can be switched between ultra-high resolution in-lens secondary electron (SE) imaging and on energy selective backscattered detection (EsB) capable of detecting smallest differences in materials composition.       
Thanks its modular chamber design, variable pressure options, over 15 ports, and a wealth of application specific modules including atomic force microscopy (AFM), in-situ ultra microtomy, large area mapping, and local charge compensation for convenient imaging of non-conductive samples your Merlin Compact comes with the flexibility to grow with your applications to a comprehensive nano-characterization laboratory.
MERLIN Compact
Microscope Type Electron


As Versatile as Your Applications       
Gain insights into nano materials, semiconductor samples, minerals, steels or alloys – simply use the range of application specific options:       
  • Use SEM/AFM (atomic force microscopy) Hybrid option and get information on your semiconductor and nano materials samples at atomic resolution       
  • Map large samples areas for design verification of semiconductor structures with the ATLAS large area mapping module       
  • Explore non-conducting samples such as minerals, ceramics, glass and polymers with no compromises in beam voltage, detection and analytics thanks to the charge compensation by localized variable pressure       
  • Conveniently comprehend the topography and surface roughness of MEMS devices, nano structures, indentations for hardness measurements, or scratch marks in forensic investigations with real time 3DSM imaging module       
  • Image magnetic samples with no image distortions thanks to GEMINI lens design.
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    MERLIN Compact

    MERLIN Compact

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