Advertisement

ZEISS Crossbeam Family

Share:

Crossbeam Family

Enjoy High Productivity with an Open 3D Nano-Workstation           
           
Speed up your tomography runs: use up to 100 nA FIB current with excellent spot profile to bridge the gap between micro- and nanopatterning.           
           
With Crossbeam you combine the imaging and analytical performance of the GEMINI column with the ability of a next-generation FIB for material processing and sample preparation on a nanoscopic scale. Use the modular platform concept and the open and easily extendable software architecture of this 3D nano-workstation for high throughput nanotomography and nanofabrication of even your most demanding, charging or magnetic samples.

Models

ZEISS Crossbeam 340
Attributes

This model was added by: LabWrenchCustomerService

Edit Model

Microscope Type Electron
Additional Specifications SEM
Gemini I VP optics

Chamber Size and Ports
standard with 18 ports

Stage
100 mm travel range in x/y

Charge Control
Flood Gun
Local Charge Compensation
Variable Pressure

Exemplified Options
Inlens Duo for sequential SE/EsB* imaging
VPSE detector

Advantages
Maximum sample variety due to variable pressure mode, wide range of in situ experiments, sequential Inlens SE / EsB* imaging possible.
ZEISS Crossbeam 550
Attributes

This model was added by: LabWrenchCustomerService

Edit Model

Microscope Type Electron
Additional Specifications SEM
Gemini II optics
Tandem decel option

Chamber Size and Ports
standard with 18 configurable ports or large with 22 configurable ports

Stage
standard with 100 mm or large 153 mm travel range in x/y

Charge Control
Flood Gun
Local Charge Compensation

Exemplified Options
Inlens SE and Inlens EsB* for simultaneous imaging SE/EsB* imaging
large airlock for 8 inch wafers
configure three pneumatically driven accesories simultaneously on the large chamber, e.g. STEM, 4-Quadrant-Backscatter detetor, and local charge compensation

Advantages
High throughput in analytics and imaging, high resolution under all conditions, simultaneous Inlens SE and Inlens EsB* imaging.

Features

Maximize Your SEM Insights   
Take advantage of achieving up to 30% better SEM resolution at low voltage.   
Count on the SEM performance of your ZEISS Crossbeam for 2D surface sensitive images or when performing 3D tomography. Get excellent images from any sample thanks to the Gemini optics with a resolution down to 1.4 nm at 1 kV acceleration voltage by applying a voltage to the sample with Tandem decel. Characterize your sample comprehensively with a range of detectors. Get pure materials contrast with the unique Inlens EsB detector. Investigate non-conductive specimens undisturbed by charging artifacts.   
   
Increase Your FIB Sample Throughput   
Profit from up to 40% faster material removal by the introduction of intelligent FIB milling strategies.   
Work with the highest ion beam current available in any gallium FIB-SEM. Save time with excellent FIB profiles using up to 100 nA current without compromising the ultimate FIB resolution. Profit from the speed and precision of intelligent FIB scanning strategies for material removal. Automatically prepare batches of samples, like cross-sections, TEM lamellae or any user defined pattern.   
   
Experience Best 3D Resolution in Your FIB-SEM Analysis   
Enjoy the benefits of integrated 3D EDS analysis.   
Expand the capacity of your Crossbeam with ZEISS Atlas 5, the market-leading package for fast, precise tomography. Perform EDS analysis during tomography runs with the integrated 3D Analytics module of ZEISS Atlas 5. ZEISS Crossbeam combines Gemini optics with a FIB tailored for precision and speed. Profit from best 3D resolution and leading isotropic voxel size in FIB-SEM tomography. Probe less than 3 nm in depth and produce surface sensitive, material contrast images using the Inlens EsB detector.

Photos

  • ZEISS Crossbeam 340 and Crossbeam 540

Manuals and Resources

Note: We appreciate the support of individuals and companies making their documents and resources available to our community. If you find a document or resource that does not belong please let us know by emailing info@labwrench.com

Instrument Documents

Picture of ZEISS Crossbeam Family
Founded as a workshop for precision mechanics and optics in the German city of Jena in 1846, the Carl Zeiss Group of today is a global leader in the optical...

More about ZEISS

Visit ZEISS

Questions and Answers

Recent Question Activity

Be the first to Ask a Question

Reviews

Member Reviews

There are no threads in ZEISS Crossbeam Family Reviews at this time.
Add a Review

ZEISS Crossbeam Family Articles

Helpful Resources, Articles, and Information

Enhanced resolution and faster FIB material processing for maximum efficiency ZEISS presents a new generation of focused ion beam scanning...

See All Related Articles
Advertisement

Videos

See it in action

ZEISS Crossbeam 340 & 540: Product Trailer

Enjoy high productivity with an open 3D nano-workstation. Speed up your tomography runs: use up to 100 nA FIB current with excellent spot profile to...