Prior Scientific H116 ProScan™ Microscope Stage


H116 ProScan™ Microscope Stage

The H116 stage is suitable for most larger microscopes and can easily accommodate 8 inch (200mm) wafers and a variety of large specimens, making it perfect for performing scanning of a wide range of semiconductor wafers, photo masks, flat panel displays, and printed circuit boards.


  • Travel 255mm x 215mm (10" x 8.5") 
  • Optional 100nm linear scales provide 
    the highest precision available 
  • Minimum step size (resolution) of the 
    stage is 0.04 microns 
  • H116 is available with a 2mm or 5mm 
    pitch ball screw 
  • Stages customized to fit virtually any 
    upright microscope or optical system
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