Thermo Scientific iCAP TQs ICP-MS system


iCAP TQs ICP-MS system

Delivering Triple Quadrupole Technology, the Thermo Scientific™ iCAP™ TQs ICP-MS is a high-performance ICP-MS for ultratrace quantification of trace elements in a variety of challenging matrices related to the semiconductor industry. Harness the superior interference removal capabilities of triple quadrupole technology without compromising detection power with this sensitive, easy-to-use, bench-top instrument. 
Experience the benefits of ultratrace analysis and expand your laboratory’s application portfolio, safe in the knowledge that your operators can quickly adopt triple quadrupole ICP-MS through the use of the Thermo Scientific™ Qtegra™ Intelligent Scientific Data Solution™ (ISDS) Software. 
The Thermo Scientific iCAP TQs ICP-MS delivers enhanced interference removal capabilities for improved detection of elemental impurities in the most challenging of matrices. With a small footprint and unique ease-of-use through streamlined workflows and automated method development, the iCAP TQs ICP-MS is the ideal inspection tool for at-line quality control to ensure consistency of critical manufacturing processes and improve semiconductor wafer fabrication yields.


    Powerful triple quadrupole technology for improved interference removal and right first time analysis. 
    Ultralow detection, even in challenging matrices. 
    Easy and fast setup using the unique Reaction Finder method development assistant. 
    Reliable instrument operation through integrated reaction gas handling features. 
    Dry fore-vacuum pump for clean room environments. 


Manuals and Resources

Note: We appreciate the support of individuals and companies making their documents and resources available to our community. If you find a document or resource that does not belong please let us know by emailing

Picture of Thermo Scientific iCAP TQs ICP-MS system
Think Thermo Scientific for superior analytical instruments, laboratory equipment, software, services, consumables and reagents. Find better workflow...

More about Thermo Scientific

Visit Thermo Scientific

Questions and Answers

Recent Question Activity

Be the first to Ask a Question


Member Reviews

There are no threads in Thermo Scientific iCAP TQs ICP-MS system Reviews at this time.
Add a Review

Thermo Scientific iCAP TQs ICP-MS system Articles

Helpful Resources, Articles, and Information

Semiconductor wafer fabrication plants and ultra-high purity chemical suppliers can now strengthen their monitoring of trace elements within...

See All Related Articles

Buy it Used!

Used Thermo Scientific iCAP TQs ICP-MS system Offerings on LabX

Thermo Scientific iCAP 6500 DUO ICP complete *** FINANCING *** WARRANTY ***

Price: $29,999.99


Configuration: As Shown