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FEI Company Quanta™ Series

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Quanta™ Series

The FEI Quanta™ line includes six variable-pressure and environmental scanning electron microscopes (ESEM™) and two DualBeam™ systems, all of which can accommodate multiple sample and imaging requirements for industrial process control labs, materials science labs and life science labs.

Models

250, 450, and 650
Attributes

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Magnification 20 to 1000000 x (quad view)
Accelerating voltage .2 to 30 kV 200 V to 30 kV
Electron Microscope Type SEM
Probe Current up to 2 µA, continuously adjustable
Microscope Type Electron
Additional Specifications Resolution  
High vacuum: 
- 3.0 nm at 30 kV (SE) 
- 4.0 nm at 30 kV (BSE) 
- 10.0 nm at 3 kV (SE) 
High vacuum with beam deceleration option: 
- 6.2 nm at 3 kV (BD mode* + vCD*) 
Low vacuum: 
- 3.0 nm at 30 kV (SE) 
- 4.0 nm at 30k V (BSE) 
- 10 nm at 3 kV (SE) 
Extended vacuum mode (ESEM): 
- 3.0 nm at 30 kV (SE) 
 
Magnification: 
Chamber Size: 
284mm-379mm inner diameter left to right
250 FEG, 450 FEG, and 650 FEG
Attributes

Edit Model

Magnification 20 to 1000000 x (quad view)
Accelerating voltage .2 to 30 kV 200 V to 30 kV
Electron Microscope Type SEM
Probe Current up to 2 µA, continuously adjustable
Microscope Type Electron
Additional Specifications Resolution  
High vacuum: 
- 0.8 nm at 30 kV (STEM)* 
- 1.0 nm at 30 kV (SE) 
- 2.5 nm at 30 kV (BSE) 
- 3.0 nm at 1 kV (SE) 
High vacuum with beam deceleration option: 
- 3.0 nm at 1 kV (BD mode* + BSE) 
- 2.3 nm at 1 kV (BD mode* + ICD*) 
- 3.1 nm at 200 V (BD mode* + ICD*) 
Low vacuum: 
- 1.4 nm at 30 kV (SE) 
- 2.5 nm at 30 kV (BSE) 
- 3.0 nm at 3 kV (SE) 
Extended vacuum mode (ESEM): 
- 1.4 nm at 30 kV (SE) 
 
Chamber Size: 
284mm-379mm inner diameter left to right

Features

The Quanta line of scanning electron microscopes are versatile, high-performance instruments with three modes (high vacuum, low vacuum and ESEM) to accommodate the widest range of samples of any SEM system. All the Quanta SEM systems can be equipped with analytical systems, such as energy dispersive spectrometer, wavelength dispersive x-ray spectroscopy and electron backscatter diffraction. In addition, the field emission gun (FEG) systems contain a S/TEM detector for bright-field and dark-field sample imaging. Another variable that changes amongst the SEM systems is the size of the motorized stage (50mm, 100mm, and 150mm) and the motorized z-range (25mm, 60mm, and 65mm, respectively). The Quanta 650 and 650 FEG are each designed with a roomy chamber, enabling the analysis and navigation of large specimens.

The Quanta SEM line now includes even more flexibility with the release of the Quanta 50 Series. These new instruments, the Quanta 250, 450, 650, and 650 FEG address the need to investigate a wide variety of materials and characterize structure and composition. The FEI Quanta™ 50 series provides flexibility and versatility to handle the challenges of today's wide ranging research needs. View any sample and get all the data - surface and compositional images can be combined with accessories for determining material properties and elemental composition.

Photos

  • Quanta™ Scanning Electron Microscope
Quanta™ Scanning Electron Microscope

Quanta™ Scanning Electron Microscope

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Instrument Documents

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