Hitachi SU3500 Premium VP-SEM with Real-Time 3-D Image Observation Now Available with a 4-Axis Motorized Stage

The Nanotechnology Systems Division of Hitachi High Technologies America, Inc. announced that its latest VP-SEM system, Model SU3500, is now available with a 4-axis motorized stage, in addition to the existing 5-axis motorized stage system. The new 4-axis version is targeted for smaller sample applications (max. 200 mm in diameter and 70 mm in height).

The 4-axis motorized stage system features the same innovative electron optics and signal detection systems as the 5-axis motorized stage system, providing unparalleled 3-D imaging and analytical performance.