Small Spot Film Thickness, UV Microscopy and Raman Microspectroscopy of Large Scale Devices- The 20/30 XL™ from CRAIC Technologies

The 20/30 XL™ is designed to work with large scale samples, such as 300 mm wafers, to measure thin film thickness as well as the Raman spectra of microscopic sampling areas.  The 20/30 XL™ also offers UV microscopy, a full spectroscopy suite as well as either manual or automated operation.  Because of the flexible instrument design, the is no upper limit to the sample size which makes this instrument perfect for everything from quality control of the largest flat panel displays to film thickness of 300 mm wafers.

 
CRAIC Technologies has developed a new solution for the semiconductor industry: the 20/30 XL™ Film Thickness Measurement Tool. The 20/30 XL™ is a microspectrophotometer is designed to non-destructively analyze microscopic areas of very large samples.   This system offers the ability to measure the thickness of thin films in both transmission and reflectance.  If also offers the ability to measure the Raman spectra of microscopic samples, along with Ultraviolet and Near Infrared microscopy of semiconductor and other types of samples.  Due to its flexible design, which gives it the ability to analyze the largest samples, applications are numerous and include mapping thin film thickness of large devices, locating and identifying contaminants, measuring strain in silicon and much more.  With the ability to spectrally analyze and image microscopic samples or microscopic areas on large devices, the 20/30 XL™ microspectrophotometer is the cutting-edge micro-analysis tool for anufacturing facilities.

“CRAIC Technologies has been an innovator in the field of UV-visible-NIR microanalysis since its founding. We have helped to advance the field of microscale analysis with innovative instrumentation, software, research and teaching. The 20/30 XL™ microspectrophotometer was born out of demand from our industrial customers to be able to microscopic features of very large devices by small spot film thickness measurement, Raman microspectroscopy and spectral imaging from the deep UV to the near IR” states Dr. Paul Martin, President of CRAIC Technologies. “As such, we have listened to our customers and created the 20/30 XL™, a system backed by years of experience in designing, building and the using of this type of instrumentation for spectroscopic and image analysis.”

The 20/30 XL™ microspectrophotometer offers an advanced film thickness measurement unit, a Raman spectrometer, a sophisticated UV-visible-NIR range microscope, high-resolution digital imaging and powerful, easy-to-use software.  This flexible instrument is designed to attach to large frames that can accomodate large scale samples.  It is able to acquire data from microscopic features of very large samples by absorbance, reflectance or even luminescence spectroscopy.   By including high-resolution digital imaging, the user is also able to use the instrument as a ultraviolet or infrared microscope.  Additionally, CRAIC Apollo™ Raman spectroscopy modules may be added so the user may also acquire small spot Raman spectra.  Touch screen controls, sophisticated software, calibrated variable apertures and other innovations all point to a new level of sophistication for microanalysis.   With high sensitivity, durable design, ease-of-use, multiple imaging and spectroscopic techniques, automation and the support of CRAIC Technologies, the 20/30 XL™ is more than just a quality control measurement tool…it is the solution to your analytical challenges.