Agilent Technologies - Turbo-V 3K-G

Manufactured by  Agilent Technologies
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The premier vacuum pumping solution for thin-film deposition

The Turbo-V 3K-G is more than a pump. It is a dedicated pumping system, designed specifically for the plasma process industry. Its pumping stages, and the entire pump structure, are optimized to work with very high flows of argon gas and very high temperatures. Additionally, it features built-in control electronics, an integrated vent and purge valve, and maintenance-free bearings. All of these assets make the Agilent Turbo-V 3K-G the optimum pumping solution for the coating industry.
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Features of Turbo-V 3K-G
       
  • The only truly "integrated" system on the market   
  • Highest pumping speeds in its class   
  • Oil-free, robust and reliable   
  • MTTF of more than 200,000 hours   
  • Leading edge rotor design provides significant reduction in weight and mechanical stress   
  • Patented rotor-shaft fitting eliminates rotor tensile stress   
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