Agilent Technologies - VacIon Plus Combination
Manufactured by Agilent Technologies
VacIon Plus Ion/Titanium Sublimation Combination Pump
An ion-sublimation combination pump is the best choice for creating an ultra-high vacuum environment for certain applications. Agilent’s titanium sublimation module creates extra-high pumping speed for getterable gases, while the ion-pumping mechanisms handle non-getterable gases, such as argon and methane.
The VacIon Plus combination pump is a VacIon Plus 150, 300, or 500 with an extra side- or bottom-mounted 8-inch ConFlat Flange port. The sublimation cryopanel containing a titanium filament source is mounted on the extra port.
The Agilent VacIon Plus series of pumps permits the addition of a cryopanel either on the bottom or the side of the pump. This flexibility can be a significant when height restrictions are a concern.
The VacIon Plus combination pump is a VacIon Plus 150, 300, or 500 with an extra side- or bottom-mounted 8-inch ConFlat Flange port. The sublimation cryopanel containing a titanium filament source is mounted on the extra port.
The Agilent VacIon Plus series of pumps permits the addition of a cryopanel either on the bottom or the side of the pump. This flexibility can be a significant when height restrictions are a concern.
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Features of VacIon Plus Combination
- Best choice for UHV environment
- Titanium sublimation module provides Ultra-high pumping speed for getterable gases
- Ion-pumping mechanisms handlel non-getterable gases
- Cryopanel can be either side- or bottom-mounted to contend with height restrictions
General Specifications
| Vacuum Pump Type | Ion Pump |
