Tescan - VEGA3 SB
Manufactured by Tescan
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Analytical Scanning Electron Microscope
The VEGA3 SB is a compact scanning electron microscope with a tungsten heated filament gun. It is built upon an analytical chamber with a motorized stage and it is equipped with a modern electron optics.
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Features of VEGA3 SB
- A unique four-lens Wide Field Optics™ design offering the variety of working and displaying modes
- The proprietary Intermediate Lens (IML) that works as an „Aperture Changer“ makes the exchange of the effective final aperture in an electromagnetic way.
- Real time In-Flight Beam Tracing™ for the performance and beam optimization integrating the well established software Electron Optical Design
- The column construction, without any mechanical centering elements, allows fully automated column set-up and alignment.
- Fast imaging rates due to first class YAG-based detectors
- Optimized analytical geometry allowing simultaneous EDX and EBSD analysis
- A fast and easy obtaining of the a clean chamber vacuum by powerful turbomolecular and rotary fore vacuum pumps
- Multi-user environment localized in many languages.
- Built-in image management and report creation
- Network operations and built-in remote access/diagnostics
- An eucentric stage with motorized XYR movements
- A favorable price to performance ratio makes VEGA3 SB models easily available
General Specifications
| Accelerating voltage | 0.2 to 30 kV |
| Electron Microscope Type | SEM |
| Probe Current | 1 pA to 2µA |
| Microscope Type | Electron |
Additional Specifications
Stage
X = 45 mm – motorized
Y = 45 mm – motorized
Z = 27 mm – manual
Z" = 6 mm – manual
Rotation: 360° continuous – motorized
Tilt: -90° to + 90°
eucentrical – manual
Specimen height: maximum 36 mm
Chamber
Internal diameter: 160 mm
Door width: 120 mm
Number of ports: 10
Chamber suspension: mechanic