Tescan - MIRA3 LM
Manufactured by Tescan
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High Performance FESEM> A high brightness Schottky emitter for high-...
High Performance FESEM
Modern Electron Optics
Analytical Potential
Automated Analysis
Sophisticated Control
- A high brightness Schottky emitter for high-resolution/ high-current/low-noise imaging
- A powerful In-Beam Detector for high resolution imaging especially at low accelerating voltages optionally available
Modern Electron Optics
- A unique three-lens Wide Field Optics design offers a variety of working and displaying modes.
- The proprietary Intermediate Lens (IML) that works as an „Aperture Changer“ makes the exchange of the effective final aperture in an electromagnetic way.
- The column construction, without any mechanical centering elements, allows fully automated column set-up and alignment
- Real time In-Flight Beam Tracing™ for the performance and beam optimization integrating the well established software Electron Optical Design. It includes also direct and continual control of beam spot size and beam current
- Unique live stereoscopic imaging an 3D surface reconstruction utilizing the 3D Beam technology
- Fast imaging rate up to 20 ns/pixel
Analytical Potential
- A large chamber with 5 axes motorized compucentric stage
- Fast imaging rates due to first class YAG-based detectors
- 11+ chamber interface ports with optimized geometry for EDX, WDX, EBSD
- Integrated pneumatic or optional active vibration isolation for ambient vibration reduction
Automated Analysis
- The fast and accurate computer controlled stage is suitable for different applications in automated analysis
- Communication with external software or third party products via TCP/IP interface (e.g. automated EDX analysis)
- High-throughput large-area automation, e.g. automated particle location and analysis
Sophisticated Control
- A fully automated microscope set-up including electron optics set-up and alignment
- Sophisticated software for SEM control, image acquisition, archiving, processing and analysis
- Multi-user environment localized in many languages
- Three levels of user expertise, including an EasySEM mode for inexperienced users
- Built-in image management and report creation
- Network operations and built-in remote access/diagnostics
- System built in self-diagnostics
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Documents & Manuals
There are no Documents or Manuals available.
Features
There are no Features available.
General Specifications
| Magnification | 3.5 to 1000000 x |
| Accelerating voltage | 0.2 to 30 kV |
| Electron Microscope Type | SEM |
| Probe Current | 2 pA to 100 nA |
| Microscope Type | Electron |
Additional Specifications
Chamber
Internal diameter: 230 mm
Door width: 148 mm