Adixen - AD3KH range
Manufactured by Adixen
Large dry pumps for harsh processes
Based on the field proven technology developed over the last 15 years in the semiconductor industry, adixen has developed a new high capacity dry pump series able to answer the needs of harsh Solar & FPD process applications, such as PECVD SiN, MOCVD or semiconductor processes such as ALD, ...
This range is composed of 3 versions: AD43KH, AD63KH and AD103KH depending on required pumping speed.
Applications:
This range is composed of 3 versions: AD43KH, AD63KH and AD103KH depending on required pumping speed.
Applications:
- FPD manufacturing processes
- Photovoltaic cell processing (ARC, PECVD)
- Semiconductor Processes (ALD, TiN...)
- NF3 cleans compatible
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Features of AD3KH range
- High pumping speed (up to 5,100 m3/h)
- High Volume/Flow version: Evacuation of volume sizes up to 10 m3
- High continuous H2 flow
- Low footprint
- Low CoO: Reduced power consumption: Low cooling water requirements and Modular concept for flexibility and easier layout management
Benefits
- The AD3KH range uses the well proven multistage Roots technology, one of the lowest energy consumption technologies on the market
- NF3 cleans compatible (special seals and cast iron materials)
- Highest protection against powder and highly corrosive gases
- Compatible with field monitoring networks
- Separated wheel mounted frame for easy maintenance
General Specifications
There are no General Specifications available.
Series Modals
Adixen - AD103KH
[+] View Model Specifications| Depth | 1455 mm |
| Height | 1647 mm |
| Max. Pumping Speed | 5100 m3/hr |
| Width | 770 mm |
| Exhaust Connection | ISO KF40 |
| Power Requirements | 208/220V or 380-480V 3 phases 50/60 Hz |
| Inlet Connection | ISO K 200 |
| Noise Level | 75 dB |
| Weight | 590 kg |
| Additional Model Specifications |
Adixen - AD43KH
[+] View Model Specifications| Depth | 1330 mm |
| Height | 985 mm |
| Max. Pumping Speed | 2100 m3/hr |
| Width | 665 mm |
| Exhaust Connection | ISO KF40 |
| Power Requirements | 208/220V or 380-480V 3 phases 50/60 Hz |
| Inlet Connection | ISO K 160 |
| Noise Level | 71 dB |
| Weight | 770 kg |
| Additional Model Specifications |
Adixen - AD63KH
[+] View Model Specifications| Depth | 1455 mm |
| Height | 1544 mm |
| Max. Pumping Speed | 3950 m3/hr |
| Width | 770 mm |
| Exhaust Connection | ISO KF40 |
| Power Requirements | 208/220V or 380-480V 3 phases 50/60 Hz |
| Inlet Connection | ISO K 160 |
| Noise Level | 71 dB |
| Weight | 590 kg +560kg |
| Additional Model Specifications |