Adixen - ATH-M Series
Manufactured by Adixen
Maglev hybrid turbomolecular pumps series
High throughput applications
Adixen's Maglev series (from ATH 500 M to ATH 3200 M) are designed for high pressure, high throughput and robust pumping needed for industry applications such as semiconductor, FPD, coating, photovoltaic and other applications.
Adixen's Maglev series (from ATH 500 M to ATH 3200 M) are designed for high pressure, high throughput and robust pumping needed for industry applications such as semiconductor, FPD, coating, photovoltaic and other applications.
Active Questions & AnswersAsk a Question
There are no current Discussions
Vacuum Pumps Service ProvidersView All (13)
Documents & ManualsView All Documents
Features of ATH-M Series
Corrosion proof features
- Automatic balancing system
- Built-in 75°C heating system
- 5 active axes
- Inert gas purge
A compact and modern design
- On board controler and rack controler for all installation needs
- Adjustable rotational speed for optimizing pumping parameters
- Very high MTBF
- Low cost of ownership
- Low noise and vibration levels
- Battery free
General Specifications
There are no General Specifications available.
Series Modals
Adixen - ATH 1600 MT
[+] View Model Specifications| Maximum Temperature | 75 °C |
| Inlet Connection | DN200 / DN250 |
| Weight | 34 kg |
| Additional Model Specifications |
Adixen - ATH 1603 M
[+] View Model Specifications| Inlet Connection | DN200 / DN250 |
| Weight | 34 kg |
| Additional Model Specifications |
Adixen - ATH 2300 MT
[+] View Model Specifications| Maximum Temperature | 75 °C |
| Inlet Connection | DN200 / DN250 |
| Weight | 60 kg |
| Additional Model Specifications |
Adixen - ATH 2303 M
[+] View Model Specifications| Inlet Connection | DN200 / DN250 |
| Weight | 60 kg |
| Additional Model Specifications |
Adixen - ATH 2800 M
[+] View Model Specifications| Maximum Temperature | 75 °C |
| Inlet Connection | DN250 |
| Weight | 85 kg |
| Additional Model Specifications |
Adixen - ATH 2800 MT
[+] View Model Specifications| Maximum Temperature | 75 °C |
| Inlet Connection | DN250 |
| Weight | 85 kg |
| Additional Model Specifications |
Adixen - ATH 3200 M
[+] View Model Specifications| Maximum Temperature | 75 °C |
| Inlet Connection | DN320 |
| Weight | 85 kg |
| Additional Model Specifications |
Adixen - ATH 3200 MT
[+] View Model Specifications| Maximum Temperature | 75 °C |
| Inlet Connection | DN320 |
| Weight | 85 kg |
| Additional Model Specifications |
Adixen - ATH 500 M
[+] View Model Specifications| Inlet Connection | DN100 / DN160 |
| Weight | 17 kg |
| Additional Model Specifications |
Adixen - ATH 500 MT
[+] View Model Specifications| Maximum Temperature | 65 °C |
| Inlet Connection | DN160 |
| Weight | 18 kg |
| Additional Model Specifications |