ZEISS - ORION NanoFab

Manufactured by  ZEISS
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Your 3-in-1 Multibeam Ion Microscope for Sub-10nm Nanostructuring

Fabricate sub-10nm nanostructures with speed and precision. Seamlessly switch between gallium, neon and helium beams with ORION NanoFab:   
   
  • Use the neon beam to machine nanostructures at great speed and achieve high throughput.   
  • Use the helium beam to create delicate sub-10 nm structures.   
  • Use optional gallium FIB to remove massive material.   
       
    With ORION NanoFab you profit from the only system in the world that covers the complete range of micromachining to nanomachining applications using gallium, neon and helium ion beams integrated in a single instrument
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    Features of ORION NanoFab
    Fast machining of sub-10 nm structures    Use neon and helium ion beams to create delicate sub-10 nanometer structures that demand extremely high machining fidelity. Whether your application is material removal using sputtering, gas induced etching or deposition or lithography, ORION NanoFab excels in sub-10 nm fabrication with speed and ease.        Three beams in one instrument    Use gallium FIB to remove massive material. Take advantage of the neon beam for precision nanomachining with speed or use the helium beam to fabricate delicate sub-10 nm structures. With neon and helium ion beams you avoid deposit contamination.        High resolution imaging    With imaging resolution of 0.5 nm, ORION NanoFab generates high resolution images of your sample in the same instrument that you used for fabrication. Gain new insights with images that have 5 to 10 times greater depth of field when compared to images acquired with FE-SEMs.
    General Specifications
    Microscope TypeElectron
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    • ORION NanoFab by Carl Zeiss Microscopy - Product Trailer

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