Bruker AXS - Dimension Automated AFP
Manufactured by Bruker AXS
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Get the highest performance device characterization and etch depth metrology available with the Dimension Atomic Force...
Get the highest performance device characterization and etch depth metrology available with the Dimension Atomic Force Profiler.
It is the world's only AFM single-tool fab solution designed for chemical mechanical planarization and etch metrology at 65 nm.
It is the world's only AFM single-tool fab solution designed for chemical mechanical planarization and etch metrology at 65 nm.
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Features of Dimension Automated AFP
- Combines the outstanding resolution of an atomic force microscope with the long-scan capability of an atomic force profiler * Delivers the fastest throughput of any AFM or profiler * Unsurpassed repeatability for in-line STI, W, Cu and CMP metrology * Replaces costly, destructive cross-sectioning techniques, reducing etch measurement turnaround from days to minutes * Exclusive TappingMode™ operation enables nondestructive measurement of high-aspect-ratio features
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