Cleatech - Wafer Storage Desiccator Cabinets
Manufactured by Cleatech
Cleatech’s Wafer Storage Desiccator Cabinet provides storage of up to 12" silicon wafer carriers in a particle-free nitrogen environment.
Cleatech’s Wafer Storage Desiccator Cabinet provides storage of up to 12" silicon wafer carriers in a particle-free nitrogen environment. Designed for optimal storage density of 200mm or 300mm wafers. Theses wafer desiccator cabinets are also available in Desiccant type providing isolated atmosphere chambers without having back plenum and gas ports.
Choose the optional Automatic nitrogen-purge control unit and humidity sensor which are capable of measuring and displaying humidities in the range 5-100%RH, Accurately Controls Pre-Set Relative Humidity (+/- 2% RH) and Reduces Nitrogen Consumption to 75%.
Choose the optional Automatic nitrogen-purge control unit and humidity sensor which are capable of measuring and displaying humidities in the range 5-100%RH, Accurately Controls Pre-Set Relative Humidity (+/- 2% RH) and Reduces Nitrogen Consumption to 75%.
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Features of Wafer Storage Desiccator Cabinets
- 1/4" thickness clear Acrylic or Static-Dissipative PVC * Preserves moisture-sensitive wafers in a dry, dust-free environment * Designed specifically for standard lot boxes, carriers used for 200mm and 300mm wafers. * Stainless Steel door hinge for maximum door support * Chrome Plated Lift-and-turn Compression Latch for perfect door Seals * Rubber Bulb, Vinyl one-piece door sealing * Removable Plenum chamber minimizes backfill ensures uniform gas distribution * 304 stainless steel door frame extend service lifetime and improve sealing performance * Grounded rack , hinge and door latch provide additional ESD safety
General Specifications
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Series Modals
Cleatech - 1015-10
[+] View Model SpecificationsDepth | 25 in |
Height | 60 in |
Width | 53 in |
Additional Model Specifications | Chamber Clearance: 25"W x23"D x 10.8125"H Wafer Size: 8 Inch Number of Chambers: 10 Storage capacity: 40 Construction Material: Clear Acrylic Static-Dissipative PVC |
Cleatech - 1510-4
[+] View Model SpecificationsDepth | 25 in |
Height | 48 in |
Width | 26.5 in |
Additional Model Specifications | Chamber Clearance: 25"W x23"D x 10.8125"H Wafer Size: 8 Inch Number of Chambers: 4 Storage capacity: 16 Construction Material: Clear Acrylic Static-Dissipative PVC Also available to hold 12 inch Wafer Outside Diameter: 19'W x 25"D x 64"H Note - only holds 8 of this size. |
Cleatech - 1510-5
[+] View Model SpecificationsDepth | 25 in |
Height | 60 in |
Width | 26.5 in |
Additional Model Specifications | Chamber Clearance: 25"W x23"D x 10.8125"H Wafer Size: 8 Inch Number of Chambers: 5 Storage capacity: 20 Construction Material: Clear Acrylic Static-Dissipative PVC |
Cleatech - 1510-6
[+] View Model SpecificationsDepth | 25 in |
Height | 36 in |
Width | 53 in |
Additional Model Specifications | Chamber Clearance: 25"W x23"D x 10.8125"H Wafer Size: 8 Inch Number of Chambers: 6 Storage capacity: 24 Construction Material: Clear Acrylic Static-Dissipative PVC |
Cleatech - 1510-8
[+] View Model SpecificationsDepth | 25 in |
Height | 48 in |
Width | 53 in |
Additional Model Specifications | Chamber Clearance: 25"W x23"D x 10.8125"H Wafer Size: 8 Inch Number of Chambers: 8 Storage capacity: 32 Construction Material: Clear Acrylic Static-Dissipative PVC Also available to hold 12 inch Wafer Outside Diameter: 38'W x 25"D x 64"H - holds 16 Wafers 38'W x 29"D x 64"H - holds 16 Wafers |