Brooks - 835 Vacuum Quality Monitor System
Manufactured by Brooks
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The 835 VQM is a mass spectrometer that operates from UHV to 10-5 Torr and accurately measures the gases in the vacuum chamber.
The Vacuum Quality Monitor (VQM™) by Granville-Phillips® combines the highest performance gas analysis technology with intelligent functional design that transforms complex measurement into actionable information. The 835 VQM system is the world’s fastest, lowest power, gas compositional analysis instrument with full data collection, spectral deconvolution, and data logging at 85 ms capture rates over the full 1–145 amu measurement range. Optionally, the VQM can monitor a full 1-300 amu at 120 msec rates. Partial scans can be selected to allow even faster scanning.
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Features of 835 Vacuum Quality Monitor System
- 1-145 amu total and partial pressure measurement information in 85 ms, or 1-300 amu in 125 ms * Instant access to critical measurement information including the 10 most prevalent gases in normalized, percentage and absolute values as well as total pressure and partial pressure trend graphs * Accurate hydrogen and helium measurement (no zero blast) * Data logging at all sample rates * Easy single-gas calibration using a gas already in your vacuum system * Low power (only 15 watts) * Compact design and remotely mounted gauge using a cable from one to 20 meters long
General Specifications
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Additional Specifications
Speed: Scan 1-145 amu in 85 ms or 1-300 amu in 120 ms
Power: Only 15 watts (maximum)
Size: Compact Controller and remotely mounted gauge
Software: Intuitive, comprehensive, easy to use
Communication: USB 2.0, Trigger I/Os, Analog I/Os, RS-485 to the optional Micro-Ion total pressure gauge
Easy calibration: Use any gas already in the vacuum chamber
Leak Detection: With leak trend graphs and audible alarm
Proven: Developed by the leader in vacuum instrumentation