Brooks - 835 VQM Differential Pump System

Manufactured by  Brooks
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The Differential Pump System by Granville-Phillips® extends the vacuum pressure range of the award-winning, high performance Vacuum Quality Monitor.

The Differential Pump System by Granville-Phillips® extends the vacuum pressure range of the award-winning, high performance Vacuum Quality Monitor (VQM™) to address the needs of process monitoring and process control applications at pressures up to 3 Torr. All the benefits of the VQM, including speed and ease of use, can now be used to optimize PVD, ion implant, coating, and other vacuum processes to increase productivity, improve results, and save money.
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Features of 835 VQM Differential Pump System
  • Operation from 3 Torr to 5x10-9 Torr   * 1-145 amu range or optionally 1-300 amu   * Fast: 120 msec scan   * Easy to setup including calibration   * Quickly see gas composition and trend information   * Includes turbo and roughing pumps
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