Brooks - Cryopump
Manufactured by Brooks
The Brooks CTI-Cryogenics On-Board cryogenic vacuum pumps speed integration and improve system operation is the world standard for reliability.
The Brooks CTI-Cryogenics On-Board cryogenic vacuum pumps speed integration and improve system operation is the world standard for reliability and performance. Delivering superior up-time, On-Board cryopumps and consistent performance, with fully integrated controls and supporting peripherals, deliver superior up-time to increase overall tool productivity and up-time.
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Features of Cryopump
- Fast Regen™ capability that extends cryopump performance between regenerations * Simultaneous regeneration capability, enabled by networking your cryopumps, that speeds overall system regeneration * An embedded microprocessor control to enhance performance, perform diagnostic routines and provide communication capability * Sophisticated software and easy-to-use graphical user interfaces to significantly improve performance and operation
General Specifications
Max. Pumping Speed | 500 L/min |
Additional Specifications
***On largest model