Brooks - Cryopump

Manufactured by  Brooks
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The Brooks CTI-Cryogenics On-Board cryogenic vacuum pumps speed integration and improve system operation is the world standard for reliability.

The Brooks CTI-Cryogenics On-Board cryogenic vacuum pumps speed integration and improve system operation is the world standard for reliability and performance. Delivering superior up-time, On-Board cryopumps and consistent performance, with fully integrated controls and supporting peripherals, deliver superior up-time to increase overall tool productivity and up-time.
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Features of Cryopump
  • Fast Regen™ capability that extends cryopump performance between regenerations   * Simultaneous regeneration capability, enabled by networking your cryopumps, that speeds overall system regeneration   * An embedded microprocessor control to enhance performance, perform diagnostic routines and provide communication capability   * Sophisticated software and easy-to-use graphical user interfaces to significantly improve performance and operation
General Specifications
Max. Pumping Speed500 L/min
Additional Specifications

  • 6000 Litre Capacity    
  • Normal Regeneration Time is less than 3.8 hours    
       
    ***On largest model
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