Phenom-World - Phenom XL
Manufactured by Phenom-World
Scanning Electron Microscope
The Phenom XL Scanning Electron Microscope (SEM) pushes the boundaries of compact desktop SEM performance. It features the proven ease-of-use and fast time-to-image of any Phenom system.
It is also equipped with a chamber that allows analysis of large samples up to 100 mm x 100 mm. A proprietary venting/loading mechanism ensures the fastest vent/load cycle in the world, providing the highest throughput. A newly developed compact motorized stage enables the user to scan the full sample area, and yet the Phenom XL is a desktop SEM that needs little space and no extra facilities.
Ease-of-use is given an extra boost in the Phenom XL with a single-shot optical navigation camera that allows the user to move to any spot on the sample with just a single click – within seconds.
It is also equipped with a chamber that allows analysis of large samples up to 100 mm x 100 mm. A proprietary venting/loading mechanism ensures the fastest vent/load cycle in the world, providing the highest throughput. A newly developed compact motorized stage enables the user to scan the full sample area, and yet the Phenom XL is a desktop SEM that needs little space and no extra facilities.
Ease-of-use is given an extra boost in the Phenom XL with a single-shot optical navigation camera that allows the user to move to any spot on the sample with just a single click – within seconds.
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General Specifications
Magnification | 80 to 10000 x |
Electron Microscope Type | SEM |
Resolution (nm) | 20 nm |
Microscope Type | Electron |
Additional Specifications
Light optical magnification:
3 - 16x
Digital zoom:
Max. 12x
Light optical navigation camera:
Color
High voltages:
Adjustable range between 4,8 kV and 15 kV imaging and analysis mode
Vacuum modes:
Standard mode
Charge reduction mode
High vacuum mode
Detector:
BSD
SED (optional)
Sample size:
Max. 100 mm x 100 mm
Up to 36 x 12 mm pin stubs
Sample height:
Max. 65 mm