AXT - VEGA SEM

Manufactured by  AXT
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The VEGA series was designed with respect to a wide range of SEM applications and needs in today’s research and...

The VEGA series was designed with respect to a wide range of SEM applications and needs in today’s research and industry. After 10 years of continuous development VEGA has matured to its 3rd generation. This new generation provides its users with the advantages of the latest technology, such as new improved high-performance electronics for faster image acquisition, an ultra-fast scanning system with compensation for static and dynamic image aberrations or built-in scripting for user-defined applications, all while maintaining the best price-to-performance ratio.     
     
TESCAN offers the LaB6 – lanthanum hexaboride – electron source as an option, which can be classified as somewhere in-between the Schottky emitter and a tungsten heated filament. The benefit of LaB6 is a relatively stable electron-emitting source compared to those of FE SEMs, providing higher currents at lower cathode temperatures compared to tungsten emitters. This means greater brightness, a reasonably improved resolution over the whole range of accelerating voltages and a longer cathode lifetime. Due to the higher emission current, the LaB6 emitter is the right choice for analytical applications where large beam currents are needed.
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Features of VEGA SEM
  • A unique four-lens Wide Field Optics™ design offering a variety of working and displaying modes.     * The proprietary Intermediate Lens (IML) that works as an ‘aperture changer‘ changes the effective final aperture electromagnetically.     * The use of premium materials for the lenses and coils enables an ultra-fast imaging rate down to 20 ns/pixel with minimized dynamic distortion effects.     * Newly implemented In-Flight Beam Tracing™ for high precision real-time computation of optical parameters.     * Column design without any mechanical centering elements enables fully automated column set-up and alignment.     * Unique live stereoscopic imaging using advanced 3D Beam Technology opens up the micro and nano-world for an amazing 3D experience and 3D navigation.
General Specifications
Microscope TypeStereo
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