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  4. HORIBA - Flex-CLUE

HORIBA - Flex-CLUE

Manufactured by  HORIBA
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Flex-CLUE is the ideal flexible package to handle highperformance CL analysis, for a wide range of applications, within an affordable budget.

Flex-CLUE is the ideal flexible package to handle highperformance CL analysis, for a wide range of applications, within an affordable budget. Based on a dedicated fiber-optic interface, Flex- CLUE offers a compact and remote CL solution perfectly adapted to an SEM environment where space or access is limited.
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Features of Flex-CLUE
  • Maintains original SEM functionality 
  • High-efficiency CL signal-collection 
  • Flexible spectral CL analysis
    • General Specifications

    There are no General Specifications available.

    Additional Specifications

    Optics 
    [*] High efficiency optics designed to match fiber with spectrometer aperture 
     
    Collection interface 
    [*] 200 mm retraction mechanism 
    [*] Manual version 
    [*] Fine adjustment under vacuum 
    [*] Diamond–turned mirror 
    [*] Short working-distance mirror in option 
     
    Spectrometer 
    [*] Focal length from 140 to 320 mm 
    [*] Large choice of diffraction gratings 
    [*] Single or dual-port 
     
    Detection 
    [*] Panchromatic imaging 
    [*] Monochromatic imaging 
    [*] Spectral analysis 
    [*] Hyperspectral spectroscopy analysis 
    [*] Multiple detection options (up to 2) 
    [*] Large choice of detectors 
    [*] Single or multi-channel 
    [*] Thermoelectric or cryogenic cooling 
    [*] UV, visible or near-IR 
     
    Spectral coverage 
    [*] UV-Visible optical fiber 200-1000 nm 
    [*] Visible-near-IR optical fiber 400-1700 nm 
     
    CL ouputs 
    [*] Up to 1 
     
    Electron beam control 
    CLLINK Controller: 
    [*] Multiple acquisition processing 
    (Analog, pulse mode, SE) 
    [*] Mapping, line scan, point measurement 
    [*] Complete synchronization with detection 
    [*] Control by external scan input on SEM 
     
    Software 
    [*] LabSpec Spectroscopy and Imaging suite

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