Olympus - MX63

Manufactured by  Olympus
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Olympus MX63 semiconductor industrial inspection microscope systems offer easy, accurate, and comfortable observations...

Olympus MX63 semiconductor industrial inspection microscope systems offer easy, accurate, and comfortable observations of micro-structures on wafers up to 300 mm. The microscopes meet international standards including SEMI S2/S8, CE, and UL. Advanced imaging technology delivers clear micrographs, and an ergonomic design helps minimize user fatigue.
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General Specifications
Microscope TypeDigital
Additional Specifications

Weight Approx. 35.6kg?Microscope frame 26kg? 
 
Stage (X × Y) 
Coaxial right handle with built-in clutch drive: MX-SIC8R  
Stroke: 210 x 210 mm  
Transmitted light illumination area: 189 x 189 mm 
 
Coaxial right handle with built-in clutch drive: MX-SIC6R2  
Stroke: 158 x 158 mm  
(Reflected light use only) 
 
Motorized nosepiece 
Brightfield  
Motorized sextuple with a slider slot for DIC: U-D6REMC  
Motorized centerable quintuple with a slider slot for DIC: U-P5REMC 
 
Brightfield and darkfield  
Motorized sextuple with a slider slot for DIC: U-D6BDREMC  
Motorized quintuple with a slider slot for DIC: U-D5BDREMC  
Motorized centerable quintuple with a slider slot for DIC: U-P5BDREMC 
 
Observation tube 
Wide-field (FN 22 mm) 
Erect and trinocular: U-ETR4  
Erect, tilting and trinocular: U-TTR-2  
Inverted and trinocular: U-TR30-2, U-TR30IR (for IR observation)  
Inverted and binocular: U-BI30-2  
Inverted, tilting and binocular: U-TBI30 
 
Super-wide-field (FN 26.5 mm) 
Erect, tilting and trinocular: MX-SWETTR (optical path switchover 100% (eyepiece) : 0 (camera) or 0 : 100%)  
Erect, tilting and trinocular: U-SWETTR (optical path switchover 100% (eyepiece) : 0 (camera) or 20% : 80%)  
Inverted and trinocular: U-SWTR-3 
 
Maximum load weight (including stage and holder) 
8 kg 
 
Focus 
Stroke: 32 mm  
Fine stroke per rotation: 100 Μm  
Minimum graduation: 1Μm  
Upper limit stopper and torque adjustment for coarse handle 
 
Transmitted light illumination 
Transmitted light illumination unit: MX-TILLA or MX-TILLB is required.  
- MX-TILLA: a condenser (NA 0.5) and an aperture stop  
- MX-TILLB: a condenser (NA 0.6), an aperture stop and a field stop  
Light source: LG-PS2 (12 V,100 W halogen lamp) Light guide: LG-SF  
Observation mode: brightfield, simple polarizing 
 
Reflected light illumination 
White LED(with Light Intensity Manager) 12 V 100 W halogen lamp, 100W mercury lamp  
Brightfield/darkfield/mirror cube manual changeover. (Mirror cube is optional.)  
3 position coded mirror units changed by manual operation  
Built-in motorized aperture diaphragm (Pre-setting for each objective, automatically full open for darkfield)  
Observation mode: brightfield, darkfield, differential interface contrast (DIC)*1, simple polarizing*1, fluorescence*1, infra-red*1 and MIX observation(4 directional darkfield)*2 
*1 Optional mirror cube, *2 MIX observation configuration is required

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