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  4. ULVAC - G-TRAN SERIES SH2

ULVAC - G-TRAN SERIES SH2

Manufactured by  ULVAC
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Full Range Measurement Simplified

Measuring pressure from atmospheric pressure to high vacuum range using one method is impossible using today's technology. Complex vacuum gauges with multiple gauge-types built in to the sensor head have prevailed, but these gagues are expensive and difficult to maintain. ULVAC has developed the separate sensor head method (patent pending). Capable of measuring wide range of pressure, lowering runninng cost and simplyifying maintenance.
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Features of G-TRAN SERIES SH2
Features   
  • Wide-range Measurement – Wide pressure measuring range from atmospheric pressure to high vacuum range (10+5 to 5×10–8 Pa, 760 to 3.75×10–10 Torr, 1013 to 5×10–10 mbar). (when SPU and SAU are used together)   
  • Possible to Connect Gauge Heads with Different Measurement Ranges – With Multi Ionization Gauge (patent pending), a gauge head is selected depending on the usage.   
  • Precise Measurement of Atmospheric Pressure – Confirming atmospheric pressure easily and accurately (when SAU is used together)   
  • Low Environmental Burden – Capable of reducing the running costs as only failed gauge heads are replaced   
  • Improvement in Visibility – With highly visible LED for error verification   
  • Maintenance – Easy sensor head replacement   
  • Measured Value Output Signal – Pressure output in 0 to 10V (Log output)   
  • Control Output Signal – 3 setpoint output (only SH2-1)   
  • Serial Communication – RS232C / RS485 communication (only SH2-2)   
  • Applicable Standard – Conforms with rigorous CE standards        Applications   
  • Process control in high vacuum processes such photovoltaic production, FPD, semiconductor, optic and electronic parts manufacturing systems   
  • Ultimate pressure measurement in high vacuum manufacturing systems   
  • Pressure measurement in high and ultra high vacuum equipment
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