Features   

• World's first metal type triode ionization vacuum gauge (Patent pending)   * Metal probe to withstand difficult environments   * ±10% improvement of measurement accuracy and excellent sensitivity stability   * Wide pressure measuring range from atmospheric pressure to high vacuum (10+5 to 10-5Pa, 760 to 7.75×10-8 Torr, 1013 to 10-7mbar).(When SPU and SAU are used together)   * Possible to connect gauge heads with different measurement ranges   * Utilize ULVAC's Multi-Ionization Gauge system to measure the complete range of your vacuum system   * Precise measurement of atmospheric pressure   

  Applications   * Process control in high vacuum process such as for OLED and Touch panel manufacturing system.   * Measurement of ultimate pressure at various industrial vacuum equipment such as vacuum furnaces.   * Measurement atmosphere which contains hydrocarbons (oil-based)