ULVAC - G-TRAN SERIES SW1
Wide Range Pirani Gauge
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Features of G-TRAN SERIES SW1
Features
Measures from atmospheric pressure to 5 x 10-2 Pa. * Combined sensor and controller, thus reducing cables, saving space and energy. * Operates with DC 24V input * Pressure is 0 to 10V Log output * LED Error verification for better visibility * Atmospheric pressure adjustment and zero point adjustment can be done in one-touch. * Sensor unit can be replaced easily. * 2 set points output (SW1-1) * RS232C/RS485 communication (only SW1-2) * Conforms with CE
Applications * Process control in low vacuum processes such as for semiconductor, optics and electronic parts manufacturing systems. * Process control in low vacuum range processes for industrial equipment such as vacuum furnaces, etc. * Process control for low vacuum system, which requires multiple process chambers, such as in-line sputtering and single wafer processing equipment.
General Specifications
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