Manufactured by  ULVAC
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Wide Range Pirani Gauge

This is a wide range pirani vaccum gauge which measures from atmospheric pressure to 5 x 10-2 Pa. In addition, this gauge removes control and display panels from traditional controllers, keeping the minimum necessary functions only, thus saving cost and space.
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Features of G-TRAN SERIES SW1


  • Measures from atmospheric pressure to 5 x 10-2 Pa.   * Combined sensor and controller, thus reducing cables, saving space and energy.   * Operates with DC 24V input   * Pressure is 0 to 10V Log output   * LED Error verification for better visibility   * Atmospheric pressure adjustment and zero point adjustment can be done in one-touch.   * Sensor unit can be replaced easily.   * 2 set points output (SW1-1)   * RS232C/RS485 communication (only SW1-2)   * Conforms with CE   

    Applications   * Process control in low vacuum processes such as for semiconductor, optics and electronic parts manufacturing systems.   * Process control in low vacuum range processes for industrial equipment such as vacuum furnaces, etc.   * Process control for low vacuum system, which requires multiple process chambers, such as in-line sputtering and single wafer processing equipment.

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