Manufactured by  ULVAC
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Qulee Compact Gas Monitor

"Qulee" (pronounced as "KLEE"), is ULVAC's latest model for residual gas analysis and gas monitoring during process. Feedback from facility engineers in various production lines are incorporated in the new product design offering utmost simplicity. The Qulee offers high accuracy and resolution even at high pressure (1Pa or less).

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Features of QULEE CGM


  • Ideal for process monitoring of various sputtering system
  • No differential pumping system required (at 1Pa (7.5×10-3Torr / 1×10-2 mbar) lower)
  • Integrated Display: No need for PC
  • Simple Operation: "One Click" function
  • Max 120°C (248°F) high temperature bake (250°C (482°F) when sensors are removed)
  • Electron bombard degas
  • Ion source and secondary electron multiplier protection maintenance help function
  • Traceability of analysis tube (patent pending)
  • Various Leak Tests are Available (Helium leak test, air leak test, built-up test)
  • Capable of total pressure measurement (ionization gauge)
  • Qulee QCS is Included:
    • This software is included and compatible with (Windows XP/7)
  • QIP (Quick Install Package system) is Included:
    • Auto measuring package (refer to options catalog for details)
    • Conforms with CE


  • Process monitoring for PV, FPD, and semiconductor system
  • Residual gas analysis in PVD system
  • Impurities (H2O, etc.) control in PVD system
  • For leak testing
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