Manufactured by  ULVAC
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Qulee High Performance Gas Monitor

ULVAC's new "Qulee HGM" residual gas analyzer series with revolutionary simplicity of use. Offers highest sensitivity of all models at 2.5×10-6 A/Pa, Qulee HGM can meet the needs of various R&D and other vacuum system process monitoring.

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Features of QULEE HGM


  • Offers highest sensitivity 2.5x10-6A/Pa
  • No need for PC
  • "One Click" function
  • Max 250ºC high temperature baking (300ºC when the sensors are removed)
  • Electron bombard degas
  • Filament, ion source, and secondary electron multiplier are easy to replace.
  • Unit offers protection and maintenance of ion source and secondaryelectron multiplier.
  • Traceability of analysis tube (patent pending)
  • Various Leak Tests are Available (Helium leak test, air leak test, leak up)
  • Capable of total pressure measurement (ionization gauge)
  • This software is included and compatible with (Windows XP/7)
  • Conforms with CE


  • R&D such as thermal desorption gas analysis
  • Residual gas analysis for ultra-high vacuum pumping equipment, etc.
  • Trace impurities in ga
  • R&D for photovoltaic field
  • Analysis of organic compound
  • Environmental measurements
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