Bruker Optics - InSight CAP
Manufactured by Bruker Optics
InSight CAP Compact Atomic Profiler
Production-Based Depth Metrology
Bruker’s InSight CAP automated atomic force profiler is specifically designed to be a combined platform for CMP and etch metrology for semiconductor manufacturers and suppliers. The InSight CAP system features 300 mm automated handling and proven GEM factory automation software.
Bruker’s InSight CAP automated atomic force profiler is specifically designed to be a combined platform for CMP and etch metrology for semiconductor manufacturers and suppliers. The InSight CAP system features 300 mm automated handling and proven GEM factory automation software.
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Features of InSight CAP
InSight CAP provides
- Industry-leading precision and highest resolution for CMP and Etch * Non-destructive metrology that requires no models * In-line metrology results in minutes, suitable for technology development * Small footprint and flexible configurations for optimum cost of ownership
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