Bruker Optics - InSight CAP

Manufactured by  Bruker Optics
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InSight CAP Compact Atomic Profiler

Production-Based Depth Metrology   
   
Bruker’s InSight CAP automated atomic force profiler is specifically designed to be a combined platform for CMP and etch metrology for semiconductor manufacturers and suppliers. The InSight CAP system features 300 mm automated handling and proven GEM factory automation software.
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Features of InSight CAP

InSight CAP provides   

  • Industry-leading precision and highest resolution for CMP and Etch   * Non-destructive metrology that requires no models   * In-line metrology results in minutes, suitable for technology development   * Small footprint and flexible configurations for optimum cost of ownership
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