Bruker Optics - InSight AFP
Manufactured by Bruker Optics
Fully-Automated, Atomic-Level Force Control For CMP Wafers
InSight AFP is the world’s highest performance CMP profiling and etch depth metrology system for advanced technology nodes. The system combines the latest innovations in atomic force microscopy, including Bruker’s proprietary PeakForce Tapping technology, with the proven long-scan capability of an atomic force profiler. Replacing costly wafer cross-sectioning, InSight AFP monitors etch depth, dishing, and erosion on submicron features with unsurpassed repeatability.
With its radical increases in speed and accuracy, Bruker’s fifth-generation AFP provides the industry’s highest resolution, fastest profiling, rapid 3D die mapping, and flattest profiles for submicron production.
With its radical increases in speed and accuracy, Bruker’s fifth-generation AFP provides the industry’s highest resolution, fastest profiling, rapid 3D die mapping, and flattest profiles for submicron production.
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