Hiden Analytical - EQP
Mass and Energy Analyser for Plasma Diagnostics
The advanced EQP ioniser provides for neutral and radical detection, the electron attachment ionisation feature further enhancing the detection capability for radicals in electronegative plasma chemistries.
High Sensitivity
Sub PPM detection of plasma ions, neutrals and radicals.
Ion Energy Analysis
Ion Energy distributions of plasma ions are acquired in seconds, 100 eV and 1000 eV energy range versions are available.
Afterglow, Pulsed Plasma, and Laser Ablation
A standard TTL signal gating input is included for time resolved studies. The programmable signal gating option provides for automatic data acquisition for defined time slices through the plasma pulse. Gating resolution is 100 nanoseconds.
Positive and Negative Ion Measurement
Pre-set software modes enable automatic switching between positive ion, negative ion and neutral analysis modes.
Neutral and Radical Detection
The EQP integral electron impact ioniser provides for analysis of neutral and radical species.
Electron Attachment Ionisation
This technique of soft ionisation offered as an option for the analysis of electronegative species in plasma, further enhances the analysis of neutrals and radicals.
Appearance Potential Spectra
The EQP ioniser features precision control of all ion source parameters, including the facility to accurately scan electron energy for appearance potential spectra of selected species. The appearance potential spectra provide direct information to confirm the fragmentation and excitation state of plasma neutral species.
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Features of EQP
The Hiden EQP is a combined Mass / Energy analyser for the analysis of positive AND negative ions, neutrals, and radicals from plasma processes, featuring:
- Software controlled Ion Extraction Optics for minimum plasma perturbation.
- 45° Electrostatic Sector analyser, Scan Energy at 0.05 eV increments/ 0.25eV FWHM.
- Minimum perturbation of ion flight path & constant ion transmission at all energies.
- Differentially pumped Triple filter Quadrupole, mass range options to 2500amu.
- High Sensitivity / Stability Pulse Ion Counting Detector with 7 decade dynamic range.
- Tuneable integral ioniser for appearance potential MS with electron attachment option.
- Penning Gauge and interlocks to provide over pressure protection.
- Signal gating and programmable signal gating option for time resolved studies in pulsed plasma.
- 1000eV Option, Floating option up to 10keV, Faraday Cup for high density plasmas.
- Mu-Metal, Radio-metal shielding options, high pressure operation option.
- MASsoft control via RS232, RS485 or Ethernet LAN.
General Specifications
| Mass Spectrometer Type | Quadrupole Mass Analyzer |
Additional Specifications
Plasma pressure:
up to 0.5mbar - EQP systems require differential pumping with a 60l/sec turbomolecular pump.
up to 2mbar - EQP systems require differential pumping with a 240l/sec turbomolecular pump.
> 2mbar - The EQP system is offered with the HPR 60 molecular beam sampling series
with multi stage differential pumping.
System options include:
1000 eV energy range
– 100 eV energy range is standard.
Magnetic shielding
– standard options include 500 Gauss front end shielding or 800 Gauss complete system shielding.
Water cooling
– for high density plasma applications – water cooling is required where the temperature is expected to exceed 300° C.
Driven electrode
– sampling with RF or DC biased electrode - recommended for applications where direct information about plasma interaction with the substrate under substrate bias conditions is a necessity.
Z-drive bellows sealed translator
– with gate valve to provide for sampling across the plasma volume, and for vacuum
isolation of the EQP system.
Insertion length options up to 750mm
Programmable signal gating
– recommended for pulsed plasma applications and for systems including molecular beam
sampling with chopper.
HPR-60 MBMS
– molecular beam sampling for high pressure plasma.