Hiden Analytical - XBS

Manufactured by  Hiden Analytical
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Triple Filter Mass Spectrometer configured for k-cell and e-gun MBE Deposition Rate Monitoring.

XBS Triple Filter Quadrupoles configured for multiple source monitoring in MBE deposition applications. The custom configured ioniser provides for high stability, high senstivity monitoring of oxides and metals from both k-cell and e-gun sources.

  1. MBE monitoring and control.
  2. Molecular Beam Studies.
  3. Multiple beam source analysis.
  4. High Performance RGA.
  5. Desorption / Outgassing studies / Bakeout cycles.
  6. Chamber / Process gas Contaminants.

Deposition Control and Vacuum Monitoring in MBE Processes
The Hiden XBS quadrupole mass selective detector fulfils key process requirements:

Monitoring of evaporating components and fragments (halides, oxides)

  1. Beam acceptance within a 70° cone
  2. Deposition rate control
  3. Deposition rate determination
  4. Confirmation of beam purity

Vacuum quality assessment

  1. Residual gas analysis
  2. Leak detection
  3. Vacuum diagnostics

Comprehensive control programs

  1. Multimode operation, user-programmable
  2. Up to 16 species-specific analog outputs

High contamination resistance

  1. Fully-shrouded probe, water-cooled
  2. Triple-stage mass filter
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Features of XBS

Hiden XBS mass spectrometers for high precision scientific, process applications and MBE analysis, featuring:

  • High Sensitivity, Enhanced detection from 100% to 5ppb, mass range to 510 amu.
  • Enhanced long-term Stability (less than ±0.5% height variation over 24 h).
  • Crossbeam ion source, beam acceptance through +/- 35° to transverse axis.
  • Ion source control for soft ionisation and appearance potential mass spectrometry.
  • Enhanced sensitivity for high mass transmission, Automatic mass scale alignment.
  • 2mm beam acceptance aperture – configured to specific user application.
  • Enhanced contamination resistance via the RF-only pre-filter stage.
  • Integral UHV compatible water-cooled shroud.
  • Detection limits down to 30 ions / s in molecular beam studies.
  • Monitor growth rates of 1Å / min and lower.
  • Windows™ based MASsoft control via RS232, RS485 or Ethernet LAN.
General Specifications

There are no General Specifications available.

Additional Specifications

Mass Range: 320 amu
Ion Detection: Dual Faraday/Electron Multiplier with long-life SCEM.
Partial Pressure Range: 2.5 x 10–14 mbar to 10–4 mbar
Growth Rate Determination: Typically to less than 0.01Å.s-1. Species dependent.
XBS Ioniser:
Electron bombardment
Twin filament
70° acceptance angle
Inputs/Outputs:
2 analog inputs
3 relay outputs (25VA)
5 digital I/O lines
4, 8 or 16 analog outputs (optional)
Probe Mounting Flange: DN-63-CF Conflat-type
4.5”/114 mm outer diameter
Probe Materials:
Stainless steel
Molybdenum
Aluminium oxide
Glass (SCEM)

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