Amray 1860 FE-SEM w/Kevex Superdry EDS & Digital Imaging SEM/EDS: Scanning Electron Microscope with Energy Dispersive Spectrometry Schottky Field Emission Gun gives >3nm Resolution 150mm - 6 Inch - Wafer Navigation Sensitive to Elements down to Carbon Analysis Area down to 0.1mm Sensitivity ~1 at % Sample Accommodates 150 mm - 6 Inch - Wafers and Smaller Samples Applications: Wafer Inspection or a Laboratory SEM Failure Analysis: Cross-Section and Plan-View Examination Compositional Microanalysis and Mapping Devices from Data Storage, MEMS, Semiconductor and Related