FEI Company - Inspect™
Inspect™ Scanning Electron Microscope
The Inspect S50 is the industry's leading low-vacuum scanning electron microscope (SEM) platform with high-resolution capabilities using thermal emission electron optics. While the low-vacuum settings are particularly useful for inspection and characterization of non-conductive and heavily contaminated materials, the system also minimizes sample preparation complexity for charge-free imaging and analysis. The Inspect S also has significant high-vacuum resolution that enhances its flexibility and ability to work with diverse sample types and a wide range of throughput.
Inspect F50
For high-brightness, high-current, high-resolution imaging, the Inspect F50 , a SEM equipped with a Schottky Field Emission source, provides clear, sharp and noise-free imaging. In combination with the optimized analytical chamber geometry and its four-axis, motorized tilt, eucentric specimen stage, the high- and stable beam current makes this tool well suited for (automated) short- and long-time EDS, WDS and EBSD analysis and mapping. The system's excellent lateral resolution enables easy detection of low-Z elements at low beam energies, adding value and flexibility to the Inspect F50.
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Features of Inspect™
InspectTM F50
- Easy to use, intuitive software makes highly effective operation possible for novice users
- Increase imaging performance with high resolution secondary and backscatter imaging
- Enable analytical fast and accurate EDS and EBSD analysis with stable high current FEG (up to 200 nA)
- Minimize adjustments to the column when changing kV. All adjustments are carried out automatically upon user selection of kV and/or spotsize setting
- Enable surface imaging with high brightness FEG at lower kVs
- Utilize optional beam deceleration mode to get surface and compositional information from conductive samples
InspectTM S50
- Easy to use, intuitive software makes highly effective operation possible for novice users
- Characterize conductive and non-conductive samples easily
- Minimize the amount of sample preparation: low vacuum enables charge free imaging and analysis of non-conductive specimens
- Increase analytical capabilities by enabling accurate EDS and EBSD analysis on conductive and non-conductive samples in high and low vacuum thanks to the patented through-the-lens pumping
- Stable high beam currents (up to 2 µA) enable fast, accurate analytical analysis
- Enable surface imaging with optional beam deceleration mode to get surface and compositional information from conductive samples
General Specifications
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Series Modals
FEI Company - Inspect F50
[+] View Model Specifications| Electron Microscope Type | SEM |
| Microscope Type | Electron |
| Additional Model Specifications | Resolution
High-vacuum: - 0.8nm at 30kV (STEM) * - 1.2nm at 30kV (SE) - 2.5nm at 30kV (BSE) * - 3.0nm at 1kV (SE) Accelerating Voltage: 200V – 30kV Probe Current: up to 2µA – continuously adjustable |
FEI Company - Inspect S50
[+] View Model Specifications| Accelerating voltage | 200 to 30 kV |
| Electron Microscope Type | SEM |
| Microscope Type | Electron |
| Additional Model Specifications | Resolution
High-vacuum: - 3.0nm at 30kV (SE) - 10nm at 3kV (SE) - 4.0nm at 30kV (BSE) Low-vacuum: - 3.0nm at 30kV (SE) - 4.0nm at 30kV (BSE) - < 12nm at 3kV (SE) Probe Current: up to 2µA – continuously adjustable |