ZEISS - EVO® MA 15
Manufactured by ZEISS
Analytical SEM - simply getting better
The EVO® MA 15 is the analytical SEM of choice for users offering the leading imaging and analysis solution in Materials Analysis. With a motorised 5 axis stage with large XY and Z travels, variable pressure capability as standard, and easy to use SmartSEM software, the EVO® MA 15 offers a perfect imaging solution in fields from geology, forensics, and failure analysis.
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Features of EVO® MA 15
- Variable pressure operation
- Class leading xray and EBSD analysis.
- Large stage movements
- Fast pump down
- Wavelength dispersive port as standard
- Future Assured upgrades to high pressure and water vapour enabled imaging and analysis
- High brightness LaB6 source option
- BeamSleeve® option
New features
- Remote Diagnostics over the internet
- Motorised Z movement of 50 mm, X and Y both 125 mm
- Largest specimen height increased to 145 mm
- Improved low kV imaging
- Improved La6 imaging for x-ray analysis
General Specifications
| Accelerating voltage | 0.2 to 30 kV |
| Electron Microscope Type | SEM |
| Power Requirements | 100 - 240 V, 50 or 60 Hz single phase, no water cooling requirement |
| Microscope Type | Electron |
Additional Specifications
Magnification:
< 5 - 1,000,000 x
Field of View:
6mm at the Analytical Working Distance (AWD)
X-ray Analysis:
8.5mm AWD and 35° take-off angle
OptiBeam®* Modes:
Resolution, Depth, Analysis, Field, Fisheye
Pressure Range:
10 - 400 Pa (MA Series)
10 - 3000 Pa (LS Series)
Available Detectors:
BSD Multisegment Diode
ETSE Everhart-Thornley Secondary Electron Detector
VPSE Variable Pressure Secondary Electron Detector
SCD Specimen Current Detector
Chamber:
365mm (Ø) x 275mm (h)
Maximum Specimen Height:
145 mm
Image Framestore:
3072 x2304 pixel, signal acquisition by integrating and averaging