Tescan - MIRA 3 FEG SEM
Manufactured by Tescan
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New Generation of High Resolution FEG SEMs
The MIRA 3 is a third generation of MIRA series of high resolution scanning electron microscopes equipped with a high brightness Schottky Field Emission gun.
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Features of MIRA 3 FEG SEM
- A new high-performance electronics for faster image acquisition and signal processing
- New generation ultra-fast scanning system with compensated static and dynamic image aberrations
- An extended range of scanning modes using the original Wide Field Optics™
- Software control and high level of automation
- New generation of integrated nano-lithography toolbox
- Built-in scripting for user defined applications
General Specifications
| Microscope Type | Electron |