Modern Electron Optics

• A unique three-lens Wide Field Optics design offers a variety of working and displaying modes.
• The proprietary Intermediate Lens (IML) that works as an „Aperture Changer“ makes the exchange of the effective final aperture in an electromagnetic way.
• The column construction, without any mechanical centering elements, allows fully automated column set-up and alignment
• Real time In-Flight Beam Tracing™ for the performance and beam optimization integrating the well established software Electron Optical Design. It includes also direct and continual control of beam spot size and beam current
• Unique live stereoscopic imaging an 3D surface reconstruction utilizing the 3D Beam technology
• Fast imaging rate up to 20 ns/pixel

Analytical Potential

• A large chamber with 5 axes motorized compucentric stage
• Fast imaging rates due to first class YAG-based detectors
• 11+ chamber interface ports with optimized geometry for EDX, WDX, EBSD
• Integrated pneumatic or optional active vibration isolation for ambient vibration reduction

Automated Analysis

• The fast and accurate computer controlled stage is suitable for different applications in automated analysis
• Communication with external software or third party products via TCP/IP interface (e.g. automated EDX analysis)
• High-throughput large-area automation, e.g. automated particle location and analysis

Sophisticated Control

• A fully automated microscope set-up including electron optics set-up and alignment
• Sophisticated software for SEM control, image acquisition, archiving, processing and analysis
• Multi-user environment localized in many languages
• Three levels of user expertise, including an EasySEM mode for inexperienced users
• Built-in image management and report creation
• Network operations and built-in remote access/diagnostics
• System built in self-diagnostics