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  4. Tescan - INDUSEM

Tescan - INDUSEM

Manufactured by  Tescan
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Let the SEM Work for You

The INDUSEM is a new model of a scanning electron microscope intended for industrial applications. The system is based on a platform of the third generation of VEGA SEMs built-in a robust frame. This compact and transportable device equipped with an extra large chamber enables wide sample range for quality control and failure analysis within production plant.
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Features of INDUSEM
         Industrial Design    
  • Compact design with a wheeled chassis for routine transport    
  • Extra large chamber with robust manipulator is able to accommodate large and heavy specimens    
  • Variable pressure vacuum system allows investigation of different samples, including non-conductive materials    
  • Easy-to-use touchscreen control interface for routine sample evaluation    
  • Active vibration isolation greatly reduces ambient vibration          Modern Optics    
  • The column design allows fully automated column set-up and alignment without any mechanical adjustments    
  • A unique four-lens Wide Field Optics™ design offering a variety of working and displaying modes.    
  • The proprietary Intermediate Lens (IML) that works as an "aperture changer" makes the exchange of the effective final aperture electromagnetically.    
  • Usage of premium materials for the lenses and coils allows an ultra-fast imaging rate down to 20 ns/pixel with minimized dynamic distortion effects.    
  • Newly Implemented In-Flight Beam Tracing™ for higher system performance and beam optimization          Analytical Potential    
  • First class YAG scintillator based detectors    
  • A comprehensive choice of optional detectors and accessories    
  • Chamber interface ports are optimized for micro-analytical use    
  • Obtaining the clean chamber vacuum by a powerful turbomolecular and rotary fore vacuum pumps within a few minutes          Automation Enabled    
  • Design of the system enables full software control and needs no mechanical adjustment    
  • Range of automated procedures supports automated operation, setup and alignment    
  • Optional software extension for automated particle analysis, large area observation    
  • Built-in scripting language (Python) enables access to all control functions and allows building a user-defined fully automated procedures         
General Specifications
Electron Microscope TypeSEM
Microscope TypeElectron
Additional Specifications

[u]SEM Column[/u]    
Electron Gun:     
tungsten heated filament    
Resolution (SE):    
3 nm at 30 kV    
8 nm at 3 kV    
Resolution Low Vacuum (BSE):     
3.5 nm at 30 kV    
Accelerating Voltage:     
200 V to 30 kV    
Probe Current:     
1pA to 2µA    
    
[u]Chamber[/u]    
Internal size:    
300 mm (width) x 330 mm (depth)    
Door:    
280 mm (width) x 310 mm (height)    
Number of ports:    
12+    
Chamber suspension:    
active vibration isolation    
    
[u]Working Vacuum[/u]    
High vacuum mode:    
< 9 × 10-3 Pa    
Medium vacuum:    
3 – 150 Pa    
Low vacuum mode:    
3 – 500 Pa    
    
[u]Stage[/u]    
Type:     
compucentric    
Movements:    
Fully motorized:    
X = 130 mm    
Y = 130 mm    
Z = 100 mm    
Rotation: 360° continuous    
Tilt: -30° to +90°    
Specimen height:    
maximum 145 mm

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