The VELA FIBxSEM is a favorable combination of the electron and ion sources and optical columns attached on one chamber. It extends imaging qualities of the scanning electron microscope with the possibility of surface modification by a focused ion beam.  
  
SEM Part  
The SEM column on the is based on the VEGA 3 Wide Field OpticsTM design with tungsten heated filament electron gun. Newly Implemented In-Flight Beam Tracing™ for higher system performance and beam optimization.  

  

1. Imaging function  
   
2. Micro-analytical function  
   
3. Navigation function  
   
4. E-Beam lithography available with an optional Beam Blanker  
   

  
  
FIB Part  
A unique ion optic column differentially pumped (2 ion pumps) for ultra-low ion scattering effect equipped with gallium ion liquid metal source.  
Motorized aperture changer with ultra-high reproducibility. Beam Blanker and Faraday cup included as standard.  

  

1. Micro/nano machining  
   
2. Ion beam lithography