The LYRA 3 FEG is a favorable combination of SEM and FIB for demanding users. It is based on a high resolution Schottky FEG-SEM column and a high performance FIB column.   
  
FEG SEM Part  
The SEM column on the is based on the MIRA 3 Wide Field OpticsTM design with a Schottky field emission gun.  

  

1. Imaging function  
   
2. Micro-analytical function  
   
3. Navigation function  
   
4. E-Beam lithography available with an optional Beam Blanker  
   

  
FIB Part  
A unique ion optic column differentially pumped (2 ion pumps) for ultra-low ion scattering effect equipped with gallium ion liquid metal source.  
Motorized aperture changer with ultra-high reproducibility. Beam Blanker and Faraday cup included as standard.  

  

1. Micro/nano machining  
   
2. Ion beam lithography