Discussion Category: Electron Microscopes
Vacuum problem with Tescan Lyra FEG XMU
Hi all,
Our machine is Tescan Lyra FEG XMU
I have got an error message
"Error,see health status panel"
and Turbo pump stopped, i unpluged the cable connected to wide range gauge and plug again,the pump works and error is gone, once venting and try pumping down error comes back