Discussion Category:  Electron Microscopes

Vacuum problem with Tescan Lyra FEG XMU

Hi all, Our machine is Tescan Lyra FEG XMU I have got an error message "Error,see health status panel" and Turbo pump stopped, i unpluged the cable connected to wide range gauge and plug again,the pump works and error is gone, once venting and try pumping down error comes back
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